InhaltsangabeContents List of Contributors.ix-xi Preface.xiixiv Acknowledgement.xv 1. Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art Sergey Y. Yurish.1 2. Novel Conversion Methods for Self-Adaptive Smart Sensors Sergey Y. Yurish and Nikolay V. Kirianaki.51 3. Resonant Piezoelectric Devices as Physical and Biochemical Sensors Fabien Josse and Richard W. Cernosek.91 4. AcousticWave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films Vittorio Ferrari.125 5. Wireless Passive SAW Identification Marks and Sensors Elke Mackensen and Leonhard Reindl.155 6. Precise Vectorial Magnetic Sensors Pavel Ripka.203 7. MicroHall Magnetic Sensors: Physics, Technologies and Applications Radivoje S. Popovic et al. 8. Modern Silicon-based MEMS Technology Ulrich Mescheder.255 9. Porous Silicon: Technology and Applications for Micromachining and MEMS Ulrich Mescheder.273 10.Thermal Design of Microelectronics Systems Dmytro Fedasyuk and Volodymyr Makar.289 11.Chemical and Biological Sensors Based on Microcantilevers P.G. Datskos, N.V. Lavrik and M. J. Sepaniak.331 12.Uncooled Infrared MEMS Detectors P.G. Datskos, N.V. Lavrik.381 13.Bulk Acoustic Wave Sensors in Chemical Analysis Maria Teresa S. R. Gomes.421 14.Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems Eugenii Katz.

InhaltsangabeContents List of Contributors.ix-xi Preface.xii-xiv Acknowledgement.xv 1. Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art Sergey Y. Yurish.1 2. Novel Conversion Methods for Self-Adaptive Smart Sensors Sergey Y. Yurish and Nikolay V. Kirianaki.51 3. Resonant Piezoelectric Devices as Physical and Biochemical Sensors Fabien Josse and Richard W. Cernosek.91 4. Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films Vittorio Ferrari.125 5. Wireless Passive SAW Identification Marks and Sensors Elke Mackensen and Leonhard Reindl.155 6. Precise Vectorial Magnetic Sensors Pavel Ripka.203 7. Micro-Hall Magnetic Sensors: Physics, Technologies and Applications Radivoje S. Popovic et al. 8. Modern Silicon-based MEMS Technology Ulrich Mescheder.255 9. Porous Silicon: Technology and Applications for Micromachining and MEMS Ulrich Mescheder.273 10.Thermal Design of Microelectronics Systems Dmytro Fedasyuk and VolodymyrMakar.289 11.Chemical and Biological Sensors Based on Microcantilevers P.G. Datskos, N.V. Lavrik and M. J. Sepaniak.331 12.Uncooled Infrared MEMS Detectors P.G. Datskos, N.V. Lavrik.381 13.Bulk Acoustic Wave Sensors in Chemical Analysis Maria Teresa S. R. Gomes.421 14.Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems Eugenii Katz.

Contents List of Contributors......................................................ix-xi Preface ....................................................................xii-xiv Acknowledgement...........................................................xv 1. Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art Sergey Y. Yurish..................................................................1 2. Novel Conversion Methods for Self-Adaptive Smart Sensors Sergey Y. Yurish and Nikolay V. Kirianaki...................................51 3. Resonant Piezoelectric Devices as Physical and Biochemical Sensors Fabien Josse and Richard W. Cernosek.......................................91 4. Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films Vittorio Ferrari..................................................................125 5. Wireless Passive SAW Identification Marks and Sensors Elke Mackensen and Leonhard Reindl..................................................155 6. Precise Vectorial Magnetic Sensors Pavel Ripka.....................................................................203 7. Micro-Hall Magnetic Sensors: Physics, Technologies and Applications Radivoje S. Popovic et al...................................................... 8. Modern Silicon-based MEMS Technology Ulrich Mescheder...............................................................255 9. Porous Silicon: Technology and Applications for Micromachining and MEMS Ulrich Mescheder...............................................................273 10.Thermal Design of Microelectronics Systems Dmytro Fedasyuk and Volodymyr Makar....................................289 11.Chemical and Biological Sensors Based on Microcantilevers P.G. Datskos, N.V. Lavrik and M. J. Sepaniak.............................331 12.Uncooled Infrared MEMS Detectors P.G. Datskos, N.V. Lavrik.....................................................381 13.Bulk Acoustic Wave Sensors in Chemical Analysis Maria Teresa S. R. Gomes......................................................421 14.Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems Eugenii Katz................................................